Title :
A research of the bandwidth of a mode-matching MEMS vibratory gyroscope
Author :
He, Chunhua ; Zhao, Qiancheng ; Cui, Jian ; Yang, Zhenchuan ; Yan, Guizhen
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
A novel electrostatic force feedback approach is presented for extending the bandwidth of a mode-matching vibratory microgyroscope. A 0.02 Hz mode-mismatch gyroscope is achieved by applying a DC voltage of 26 V to the squeeze-film combs to adjust the stiffness of the sense mode. Sweep-frequency tests demonstrate that the open loop frequency response is close to a one-order system with a bandwidth of 7.9 Hz, which agrees well with the theoretical simulation. Moreover, both experiment and simulation results show that the bandwidth can be extended to about 94Hz from 7.9Hz after adopting an electrostatic force feedback control.
Keywords :
elasticity; force feedback; gyroscopes; micromechanical devices; bandwidth 7.9 Hz; electrostatic force feedback control; frequency 0.02 Hz; mode-matching MEMS vibratory gyroscope; open loop frequency response; sense mode stiffness; squeeze-film combs; sweep-frequency tests; voltage 26 V; Fabrication; Force; Gyroscopes; Micromechanical devices; MEMS vibratory gyroscope; bandwidth; force feedback control; mode-matching;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196880
