Title :
Design and implementation of a robot assisted crucible charging system
Author :
Sujan, Vivek A. ; Dubowsky, Steven ; Ohkami, Yoshi
Author_Institution :
MIT, Cambridge, MA, USA
Abstract :
A robotic system is developed to automate the packing of polycrystalline silicon nuggets into a fragile fused silica crucible in CZ semiconductor wafer production. The highly irregular shapes of the nuggets make this a difficult and challenging task. In this system, nugget grasping is done with a three-cup suction gripper and nugget manipulation is attained with a 7-DOF SCARA manipulator. An optical 3D vision system, based on active laser triangulation, measures the nugget and crucible profiles. A model-free virtual trial and error packing algorithm determines optimal nugget placement in real time. A hybrid position-force control scheme has been implemented and tested for physical nugget placement. The integrated system achieves high production rates, required precision and cost effectiveness
Keywords :
computer vision; force control; industrial manipulators; materials handling; position control; semiconductor device manufacture; 3D vision system; SCARA manipulator; active laser triangulation; force control; grasping; packing; polycrystalline silicon nuggets; position control; semiconductor wafer production; silica crucible charging system; three-cup suction gripper; Grippers; Laser modes; Laser theory; Machine vision; Production systems; Robotics and automation; Robots; Semiconductor lasers; Shape; Silicon compounds;
Conference_Titel :
Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5886-4
DOI :
10.1109/ROBOT.2000.844883
