DocumentCode
2035171
Title
Implementation of a wafer positioning system
Author
Chen, Yi-Cheng ; Lee, Yun-Yen ; Lee, Ju-Yi ; Chen, Jian-You
Author_Institution
Inst. of Opto-Mechatron. Eng., Nat. Central Univ., Jhongli, Taiwan
fYear
2011
fDate
13-18 Sept. 2011
Firstpage
1938
Lastpage
1943
Abstract
This study implements a system for determining the precise location of a moving wafer in a process chamber. An array of optical sensors positioned along an axis transverse to the path of a moving wafer is employed in this wafer positioning system. A computer program for wafer center calculation is developed based on the time dependent signals from the optical sensing module. The developed computer program has a human machine interface, and estimates the center position as well as the moving direction of the wafer.
Keywords
array signal processing; man-machine systems; optical sensors; sensor arrays; user interfaces; wafer level packaging; computer program; human machine interface; moving wafer location; optical sensing module; optical sensor array; position estimation; process chamber; time dependent signal; wafer center calculation; wafer positioning system; Blades; Computers; Data acquisition; Detectors; Optical sensors; Robot sensing systems; Beam-breaking; Human Machine Interface; Wafer Positioning;
fLanguage
English
Publisher
ieee
Conference_Titel
SICE Annual Conference (SICE), 2011 Proceedings of
Conference_Location
Tokyo
ISSN
pending
Print_ISBN
978-1-4577-0714-8
Type
conf
Filename
6060285
Link To Document