Title :
Plasma polymerization in pulse-periodical discharge
Author :
Bugrov, G.E. ; Kondranin, S.G. ; Kralkina, E.A. ; Pavlov, V.B. ; Vavilin, K.V.
Author_Institution :
Plasma Tech Co. Ltd., Kyungki-Do, South Korea
Abstract :
Summary form only given, as follows. The paper introduces the results of plasma polymer coating deposition on metals in pulse periodical discharge i.e. in a discharge that consists of periodically repeated sets of pulses. It is known that as a result of certain voltage application to the discharge gap the breakdown of gas takes place.
Keywords :
plasma deposition; polymer films; polymerisation; metals; periodically repeated sets; plasma polymer coating deposition; plasma polymerization; pulse-periodical discharge; Annealing; Breakdown voltage; Coatings; Dielectric constant; Electric breakdown; Electrons; Gases; Plasma applications; Plasma stability; Polymer films;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1229960
