Title :
Plasma enhanced metal organic chemical vapor deposition (PEMOCVD) of catalytic coatings for fuel cell reformers
Author :
Dhar, Rajdeep ; Pedrow, Patrick D. ; Moeller, T.M. ; Ming, Q.
Author_Institution :
Sch. of EECS, Washington State Univ., Pullman, WA, USA
Abstract :
Summary form only given, as follows. In this experimental work, catalytic metals are being loaded onto substrates by a plasma-polymerization step followed by calcination.
Keywords :
MOCVD coatings; calcination; catalysis; fuel cells; plasma CVD coatings; polymerisation; PEMOCVD; calcination; catalytic coatings; fuel cell reformers; plasma enhanced metal organic chemical vapor deposition; plasma-polymerization step; Chemical vapor deposition; Coatings; Fuel cells; Organic chemicals; Plasma chemistry; Plasma density; Plasma measurements; Plasma x-ray sources; Substrates; Tin;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1229962