DocumentCode
2037244
Title
Performances improvement of MEMS sensors and energy scavengers by diamagnetic levitation
Author
De Pasquale, Giorgio ; Siyambalapitiya, Chamila ; Somà, Aurelio ; Wang, Jing
Author_Institution
Mech. Dept., Politec. di Torino, Torino, Italy
fYear
2009
fDate
14-18 Sept. 2009
Firstpage
465
Lastpage
468
Abstract
The employment of the diamagnetic levitation strategy by MEMS inertial sensors and energy scavengers is analyzed as an alternative to traditional mechanical suspensions, with special focus on performance improvements in accuracy and efficiency. The basics of the diamagnetic levitation are described. Both analytical and numerical simulation approaches are presented, followed by validation of the predicted values by measurements in the static field.
Keywords
diamagnetic materials; energy harvesting; magnetic levitation; microsensors; MEMS inertial sensor; diamagnetic levitation strategy; energy scavenger; numerical simulation approach; Damping; Electromechanical sensors; Magnetic levitation; Magnetic materials; Magnetic sensors; Mechanical sensors; Micromechanical devices; Power generation; Suspensions; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Electromagnetics in Advanced Applications, 2009. ICEAA '09. International Conference on
Conference_Location
Torino
Print_ISBN
978-1-4244-3385-8
Electronic_ISBN
978-1-4244-3386-5
Type
conf
DOI
10.1109/ICEAA.2009.5297394
Filename
5297394
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