Title :
Performances improvement of MEMS sensors and energy scavengers by diamagnetic levitation
Author :
De Pasquale, Giorgio ; Siyambalapitiya, Chamila ; Somà, Aurelio ; Wang, Jing
Author_Institution :
Mech. Dept., Politec. di Torino, Torino, Italy
Abstract :
The employment of the diamagnetic levitation strategy by MEMS inertial sensors and energy scavengers is analyzed as an alternative to traditional mechanical suspensions, with special focus on performance improvements in accuracy and efficiency. The basics of the diamagnetic levitation are described. Both analytical and numerical simulation approaches are presented, followed by validation of the predicted values by measurements in the static field.
Keywords :
diamagnetic materials; energy harvesting; magnetic levitation; microsensors; MEMS inertial sensor; diamagnetic levitation strategy; energy scavenger; numerical simulation approach; Damping; Electromechanical sensors; Magnetic levitation; Magnetic materials; Magnetic sensors; Mechanical sensors; Micromechanical devices; Power generation; Suspensions; Vibrations;
Conference_Titel :
Electromagnetics in Advanced Applications, 2009. ICEAA '09. International Conference on
Conference_Location :
Torino
Print_ISBN :
978-1-4244-3385-8
Electronic_ISBN :
978-1-4244-3386-5
DOI :
10.1109/ICEAA.2009.5297394
