DocumentCode
2037780
Title
Determination of the work function of the Co thin films by using /spl gamma/-FIB system
Author
Oh, H.J. ; Hyun, J.W. ; Lim, Yang Choon ; Kim, S.S. ; Kim, Tae Wook ; Choi, Eun Ha ; Kang, S.O.
Author_Institution
Dept. of Electrophys., Kwangwoon Univ., Seoul, South Korea
fYear
2003
fDate
5-5 June 2003
Firstpage
426
Abstract
Summary form only given, as follows. Summary form only given. The physical properties of the metal-semiconductor heterointerfaces have received much attention for many years because of a desire to develop fabrication technology for high-speed electron devices. Recently, the growth of magnetic thin films on compound semiconductor substrates has been particularly attractive from both the scientific and the technological points of view in connection with spintronics. Investigations of the secondary electron emission coefficient /spl gamma/ and the work function of Co thin films grown on GaAs substrate are very important for understanding the electronic properties of the Co/GaAs heterostructures. Co thin films on the GaAs(100) substrates were grown at room temperature by using the ion beam-assisted deposition. The secondary electron emission coefficient /spl gamma/ measurements were carried out using a home made /spl gamma/-Focused Ion Beam system, and the He, Ne, Ar, Xe gases used as ion sources. The work function of the Co thin films can be determined from the dependences of the /spl gamma/ values on the type of incident ion and on the acceleration voltage by using Auger neutralization theory. These results provide important information on the electronic properties of Co thin films grown on GaAs(100) substrates at room temperature.
Keywords
III-V semiconductors; band structure; cobalt; focused ion beam technology; gallium arsenide; interface states; ion beam assisted deposition; metallic thin films; semiconductor-metal boundaries; work function; /spl gamma/-FIB system; Auger neutralization theory; Co thin films; Co-GaAs; Co/GaAs heterostructures; electronic properties; fabrication technology; high-speed electron devices; ion beam-assisted deposition; metal-semiconductor heterointerfaces; secondary electron emission coefficient; work function; Electron devices; Electron emission; Fabrication; Gallium arsenide; Magnetic films; Magnetoelectronics; Semiconductor thin films; Substrates; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location
Jeju, South Korea
ISSN
0730-9244
Print_ISBN
0-7803-7911-X
Type
conf
DOI
10.1109/PLASMA.2003.1229993
Filename
1229993
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