Transition from electrostatic to electromagnetic mode in atmospheric pressure RF Ar inductively coupled plasma

Author

Razzak, M.A. ; Kondo, K. ; Uesugi, Yoshihiko ; Takamura, S.

Author_Institution

Graduate Sch. of Eng., Nagoya Univ., Japan

fYear

2003

fDate

5-5 June 2003

Firstpage

446

Abstract

Summary form only given, as follows. In this paper, the dynamics of E-H discharge mode transition of Ar ICP in atmospheric pressure with a driving frequency range of 0.5/spl sim/1.5 MHz and a moderate rf power of about 2/spl sim/5 kW are investigated experimentally. The transition parameters are calculated by using a proposed model, and the calculated results are compared with that of the experimental results.

Keywords

argon; discharges (electric); plasma materials processing; plasma sources; 0.5 to 1.5 MHz; Ar; RF inductively coupled plasma; absorbed power; atmospheric pressure; azimuthal discharges; electromagnetic discharge modes; electrostatic discharge modes; electrostatic electromagnetic mode transition; induced electric field; multiple discharge paths; plasma heating; plasma loading impedance; ring-shaped discharges; steady state plasmas; streamer-like discharges; transition parameters; Argon; Atmospheric-pressure plasmas; Electromagnetic coupling; Electromagnetic induction; Electrostatics; Plasma applications; Plasma materials processing; Plasma properties; Radio frequency; Thermal spraying;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Conference_Location

Jeju, South Korea

ISSN

0730-9244

Print_ISBN

0-7803-7911-X

Type

conf

DOI

10.1109/PLASMA.2003.1230027

Filename

1230027