On-chip differential and common mode voltage measurement using off-chip referenced twin probing

Direct measurement technique called off-chip referenced twin probing is presented. Both signal and ground lines are measured symmetrically using a pair of probes with built-in on-chip series resistors to minimize and predict probing invasiveness. Compensation procedure of the frequency dependence due to non-ideality of the probing system is defined to improve measurement fidelity in high-frequencies. In addition, by fully utilizing information from a pair of measurement waveform, on-chip common mode voltage is measured for the first time. Example measurement of a transmission line structure demonstrates 2 mV noise floor, -26 dB invasiveness, and more than 10 GHz bandwidth.