Spatial Distribution Maps for Atom Probe Tomography

Author

Geiser, B.P. ; Schneir, J. ; Roberts, J. ; Wiener, S. ; Larson, D.J. ; Kelly, T.F.

Author_Institution

Imago Sci. Instrum. Corp., Madison, WI

fYear

2006

fDate

38899

Firstpage

21

Lastpage

22

Abstract

This paper proposes obtaining structural information by directly imaging offsets between neighboring atom positions after reconstruction. This technique requires much less memory and CPU processing time than either FT implementation described above. Additionally, in certain situations position-dependent reconstruction aberrations can be estimated across much of the field of view by direct examination of peak shapes in the resulting 3D spatial distribution functions

Keywords

aberrations; crystal structure; image reconstruction; optical tomography; tungsten; 3D spatial distribution functions; CPU processing; W; atom probe tomography; crystallographic structure; neighboring atom positions; position-dependent reconstruction aberrations; Atomic measurements; Crystallization; Discrete Fourier transforms; Distortion measurement; Histograms; Image reconstruction; Lattices; Probes; Tomography; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Conference_Location

Guilin

Print_ISBN

1-4244-0401-0

Type

conf

DOI

10.1109/IVNC.2006.335314

Filename

4134439