Development of an impedance monitoring system for the Hanbit device

Summary form only given, as follows. The impedance monitoring system to make use of a voltage and current probe has been developed for the Hanbit Mirror device. The impedance monitoring system installed in the matching network and measured the whole impedance of the system including matching circuit, RF antenna and plasma. The Hanbit Device is typically operated during 100/spl sim/300 ms over 10/sup -4/ Torr. However, it is almost impossible to adjust the matching condition during the discharge. The impedance monitoring system is the fastest way to find the best power coupling condition and necessary to keep the consistent discharge in the modulated discharge. The system consists of the V-I probe and phase detection circuit. The impedance data from the phase information and measured reflected power can cast in the Smith Chart. In this presentation, the characteristics of the impedance monitoring system and the experimental data will be discussed.