A non-contact type RF MEMS switch to remove stiction problem

The continuously evolving MEMS technology for RF/microwave applications poses issues regarding new reliability and lifetime estimation. This paper presents a non-contact type RF MEMS switch which is free from stiction and microwelding problems, The switch is developed in Comsol Multiphysics and is a capacive shunt type using a variation of the capacitance between signal line and ground lines. The capacitance is precisely regulated by comb-drive actuators. This concept is simple, but the design requires a precise mechanical motion to be achieved in switch fabrication. The mechanical structure of the proposed switch is made of single crystal silicon (SCS). Therefore, these structures demonstrate excellent mechanical performance, no warping, no predeformation and high strength.