Title :
Broadband Permittivity Extraction from On-Wafer Scattering-Parameter Measurements
Author :
Arz, U. ; Leinhos, J.
Author_Institution :
Phys.-Tech. Bundesanstalt, Braunschweig
Abstract :
We examine a broadband method to extract the dielectric constant and loss tangent of low-loss substrate materials from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. We compare against multiple-frequency measurements performed with a commercially available split-cylinder resonator and show good agreement over a broad frequency range for AF45 and alumina substrates.
Keywords :
coplanar waveguides; feature extraction; permittivity; resonators; alumina substrates; broadband permittivity extraction; coplanar waveguides; dielectric constant extraction; low-loss substrate materials; multiple-frequency measurements; on-wafer scattering-parameter measurements; split-cylinder resonators; Coplanar waveguides; Dielectric constant; Dielectric loss measurement; Dielectric materials; Dielectric measurements; Dielectric substrates; Length measurement; Loss measurement; Permittivity measurement; Scattering;
Conference_Titel :
Signal Propagation on Interconnects, 2008. SPI 2008. 12th IEEE Workshop on
Conference_Location :
Avignon
Print_ISBN :
978-1-4244-2317-0
Electronic_ISBN :
978-1-4244-2318-7
DOI :
10.1109/SPI.2008.4558382
