Title :
The New Laser Assisted Wide Angle Tomographic Atom Probe
Author :
Renaud, L. ; Monsallut, P. ; Benard, Ph. ; Saliot, Ph. ; Da Costa, G. ; Vurpillot, F. ; Deconihout, B.
Author_Institution :
CAMECA, Courbevoie
Abstract :
A laser assisted wide angle tomographic atom probe (La-WATAP) was developed to overcome traditional drawbacks of a conventional 3D atom probe. This instrument offers two major advantages: a larger field of view and its applicability to non- and semiconductor materials
Keywords :
laser beam applications; mass spectrometers; optical tomography; 3D atom probe; field of view; laser assisted wide angle tomographic atom probe; nonconductor materials; semiconductor materials; Atom lasers; Atomic beams; Atomic measurements; Chemical lasers; Conducting materials; Optical design; Optical materials; Position sensitive particle detectors; Probes; Tomography;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335354
