Micro-positioning and actuation devices using giant magnetostriction materials

Giant magnetostriction materials feature include outstanding magnetostriction, high energy density, high Curie temperature and quick response. This paper presents two kinds of novel applications of giant magnetostriction materials: a compact fine positioner and a wire clamper. The former is able to achieve highly accurate positioning due to a novel structure design which substantially reduces the influence of Joule heat generated by the solenoid coil. The latter application is motivated by a great demand towards a wire clamping device for semiconductor manufacturing, which is capable of maintaining a sufficient clamping force without fatigue