DocumentCode :
2040717
Title :
Mesoporous thin films for chemical sensors
Author :
Innocenzi, Plinio ; Bearzotti, Andrea ; Traversa, Enrico
Author_Institution :
Dip. di Ingegneria Meccanica, Settore Materiali, Padova Univ., Italy
fYear :
2000
fDate :
2000
Firstpage :
49
Lastpage :
56
Abstract :
Silica mesoporous thin-films were prepared using cetyltrimethylammonium bromide surfactant as a template. The films were deposited by dip-coating on Si and alumina substrates and calcined at 250 and 450°C. The films were characterized by X-ray diffraction (XRD) analysis, Fourier transform infrared (FTIR) spectroscopy and Rutherford backscattering spectrometry (RBS). The films maintained the mesophase after calcination. The electrical response of the silica mesoporous thin-films was studied at various concentrations of alcohols (methanol, ethanol, 2-propanol, butanol, and hexane). A large sensitivity to the alcohols at room temperature was observed, with the possibility to discriminate between the different alcoholic species. The films were also tested as humidity sensors and showed an increase in current intensity as a function of relative humidity, with a large response at low humidity values. No memory effects were observed after cyclic testing in dry-wet conditions. Electrical characterisation indicates that the mesophase is easily accessible by the external environment.
Keywords :
Fourier transform spectra; Rutherford backscattering; X-ray diffraction; chemical sensors; heat treatment; humidity sensors; infrared spectra; liquid phase deposited coatings; porous semiconductors; silicon compounds; surfactants; 2-propanol; 250 degC; 450 degC; Al2O3; Fourier transform infrared spectroscopy; Rutherford backscattering spectrometry; Si; Si substrate; SiO2; X-ray diffraction; alcohol sensitivity; alumina substrate; butanol; calcination; cetyltrimethylammonium bromide surfactant template; chemical sensor; dip coating; dry-wet cycling; electrical characteristics; ethanol; hexane; humidity sensor; memory effect; mesophase; methanol; silica mesoporous thin film; Alcoholic beverages; Chemical sensors; Humidity; Infrared spectra; Mesoporous materials; Silicon compounds; Spectroscopy; Testing; Thin film sensors; Thin films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Print_ISBN :
0-7803-6698-0
Type :
conf
DOI :
10.1109/COMMAD.2000.1022888
Filename :
1022888
Link To Document :
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