Title :
The Quantitative Operational Space for Three-dimensional Atom Probes
Author :
Miller, Michael K. ; Larson, D. J. ; Olson, J. D. ; Kostrna, S. L. P. ; O´Neil, R. W. ; Geiser, B. ; Oltman, E.
Author_Institution :
Div. of Mater. Sci. & Technol., Oak Ridge Nat. Lab., TN
Abstract :
The operational space for quantitative analysis of a range of materials has been investigated with local electrode atom probe equipped with a high pulse repetition rate voltage pulse generator and a ultrafast pulsed laser. This operating space has been explored with the following systems: a binary alloy composed of elements with dramatically different evaporations fields; a material with a single isotope and a low fraction of a solute; a multi-element commercial alloy; and highly resistive material. The materials chosen for this study included an Fe-3.25% Si alloy, aluminium alloy, a nickel based superalloy, a zirconium-based alloy and a semiconductor
Keywords :
aluminium alloys; field evaporation; high-speed optical techniques; iron alloys; nickel alloys; silicon alloys; zirconium alloys; FeSi; evaporations fields; high pulse repetition rate voltage pulse generator; isotope; operational space; three-dimensional atom probes; ultrafast pulsed laser; Aluminum alloys; Atomic beams; Electrodes; Nickel alloys; Optical materials; Optical pulse generation; Probes; Semiconductor materials; Silicon alloys; Space exploration;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335371