Development of a High-Resolution Active-matrix Electron Emitter Array for Application to High-Sensitivity Image Sensing

Author

Negishi, N. ; Matsuba, Y. ; Tanaka, R. ; Nakada, T. ; Sakemura, K. ; Okuda, Y. ; Watanabe, A. ; Yoshikawa, T. ; Ogasawara, K. ; Nanba, M. ; Okazaki, S. ; Tanioka, K. ; Egami, N. ; Koshida, N.

Author_Institution

Corp. R&D Lab., Pioneer Corp., Saitama

fYear

2006

fDate

38899

Firstpage

167

Lastpage

168

Abstract

An active-matrix planar-type cold electron emitter array for application to high-sensitivity image sensors have been developed. A 640times480 pixel active-matrix HEED (high-efficiency electron emission device) with 20times20 mum pixels was fabricated, and the emission current density of 1 A/cm² has been obtained at an applied voltage of 23 V. Further studies toward the next generation image sensor with a high sensitivity are in progress

Keywords

current density; field emitter arrays; image sensors; 23 V; active-matrix HEED; active-matrix planar-type cold electron emitter array; emission current density; high-efficiency electron emission device; high-sensitivity image sensors; Active matrix technology; Charge carrier processes; Current density; Driver circuits; Electrodes; Electron emission; Electron guns; Image sensors; Pixel; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Conference_Location

Guilin

Print_ISBN

1-4244-0401-0

Type

conf

DOI

10.1109/IVNC.2006.335411

Filename

4134513