Title :
Fabrication and Characteristics of Novel Graphite Field-Emitters for Application to Electron-Beam Pumped Light Sources
Author :
Shiozawa, Kazufumi ; Neo, Yoichiro ; Okada, Morihiro ; Takahashi, Masafumi ; Hashiguchi, Gen ; Ikedo, Tomoyuki ; Mimura, Hidenori
Author_Institution :
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu
Abstract :
Light emission based on the excitation of rare gases by a low energy dc electron beam is a promising approach for realizing deep- or vacuum-ultraviolet light sources or lasers that are compact and have high efficiency. Carbon nanotube (CNT) field emitters have been used as electron sources in replacement of thermal cathodes to construct a low energy-consumption, compact and low-cost system. However, CNT technologies experience problems relating to the adherence of the interface between the carbon layers and their substrate. To try to solve the problem, carbon nanoneedle field-emitters were fabricated by etching a graphite substrate with H2 gas using radio frequency (RF) magnetron sputtering equipment. Scanning electron microscopy, energy-dispersive X-ray fluorescence spectroscopy, and electron emission measurements were performed for the characterization of graphite field-emitters
Keywords :
X-ray chemical analysis; adhesion; electron sources; field emitter arrays; graphite; light sources; nanostructured materials; scanning electron microscopy; sputter etching; substrates; C; adherence; carbon nanoneedle field-emitters; electron emission measurements; electron sources; electron-beam pumped light sources; energy-dispersive X-ray fluorescence spectroscopy; etching; graphite field-emitters; graphite substrate; radio frequency magnetron sputtering; scanning electron microscopy; Carbon dioxide; Electron beams; Electron emission; Elementary particle vacuum; Gas lasers; Gases; Laser excitation; Light sources; Optical device fabrication; Radio frequency;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335414