Sol-gel prepared silica-based materials for sensors and optoelectronic applications

Author

Toan, Nguyen Nhu ; Tuan, Mai Anh ; Huong, Tran Thu ; Huong, Nguyen Thanh ; Bathou, Charles ; Anh, Tran Kim ; Minh, Le Quoc ; Chien, Nguyen Duc

Author_Institution

Int. Training Inst. for Mater. Sci. (ITIMS), Hanoi, Vietnam

fYear

2000

fDate

2000

Firstpage

304

Lastpage

307

Abstract

This paper reviews our investigation results on silica-based materials prepared by sol-gel method and their applications. Spin-on glass (SOG) materials (undoped or doped with boron and phosphorus) were prepared and optimized. They were applied to the realization of MOSFET-based chemical sensors. A new technology was invented for the fabrication of sensors by using SOG diffusion source. Eu³⁺-doped silica-titania materials with different refractive indices were also prepared for waveguides. Optical and photo-luminescence measurement results are presented and discussed here.

Keywords

ion sensitive field effect transistors; optical materials; optical waveguides; photoluminescence; refractive index; silicon compounds; sol-gel processing; Eu³⁺-doped silica-titania material; MOSFET chemical sensor; SOG diffusion source; SiO₂; SiO₂-TiO₂:Eu; SiO₂:B; SiO₂:P; fabrication technology; optical waveguide; optoelectronic material; photoluminescence; refractive index; silica material; sol-gel synthesis; spin-on-glass material; Boron; Chemical sensors; Chemical technology; Glass; Optical device fabrication; Optical materials; Optical refraction; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on

Print_ISBN

0-7803-6698-0

Type

conf

DOI

10.1109/COMMAD.2000.1022949

Filename

1022949