DocumentCode
2042403
Title
Details of the ´Ring Collapse´ on Schottky Electron Emitters
Author
Bronsgeest, M.S. ; Kruit, P.
Author_Institution
Delft Univ. of Technol.
fYear
2006
fDate
38899
Firstpage
223
Lastpage
224
Abstract
To gain better understanding of the shape stability of the Zr/O/W(100) Schottky electron source, the authors investigate the details of the ring collapse. The ring collapse phenomenon has been described and the shrinkage of a stack of the (100) end planes and its eventual disappearance as its W atom and the adsorbed ZrOx entities migrate away from the apex towards the shanks. The investigation of the changes of the full emission pattern in combination with SEM imaging and field simulations has revealed detailed information on shape changes taking place in the ring collapse and the origin of the associated probe current drops. They show the typical probe current profile and the typical facet current profile during a ring collapse and also a typical emission patterns characterizing each stage. In general, the duration of a ring collapse decreases with increasing temperature and decreasing extraction voltage, while the SYMMETRY increases
Keywords
Schottky barriers; electron field emission; scanning electron microscopy; shrinkage; tungsten; zirconium compounds; (100) end planes; SEM; Zr/O/W(100) Schottky electron emitters; ZrO-W; extraction voltage; facet current profile; full emission pattern; ring collapse; shape stability; shrinkage; Electron beams; Electron guns; Electron sources; Etching; Probes; Shape; Stability; Temperature; Voltage; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location
Guilin
Print_ISBN
1-4244-0401-0
Type
conf
DOI
10.1109/IVNC.2006.335439
Filename
4134541
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