Title :
An equivalent circuit for simulating Love mode acoustic wave transducers: comparison of simulation and experimental results
Author :
Kalantar-zadeh, K. ; Wlodarski, W. ; Galatsis, K.
Author_Institution :
Sch. of Electr. & Comput. Syst. Eng., RMIT Univ., Melbourne, Vic., Australia
Abstract :
A simulation was performed using the equivalent circuit previously developed for a Love mode surface acoustic wave transducer. The present model is based on the Mason equivalent circuit for inter-digital fingers. A Love mode SiO2/ST-cut quartz transducer with operating frequency at 96 MHz was fabricated and the transfer function and input impedance were measured. Simulation results were compared with the experimental measurements and they showed close agreement.
Keywords :
Love waves; equivalent circuits; interdigital transducers; quartz; surface acoustic wave transducers; surface acoustic waves; transfer functions; 96 MHz; Love mode SiO2/ST-cut quartz transducer; Love mode acoustic wave transducers; Mason equivalent circuit; SiO2; input impedance; inter-digital fingers; transfer function; Acoustic measurements; Acoustic transducers; Acoustic waves; Circuit simulation; Equivalent circuits; Fingers; Frequency; Surface acoustic waves; Surface impedance; Transfer functions;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Print_ISBN :
0-7803-6698-0
DOI :
10.1109/COMMAD.2000.1022967