• DocumentCode
    2042883
  • Title

    Thin films of Zr1-xSnxTiO4 for application in microelectronics

  • Author

    Gusmano, G. ; Bianco, A. ; Viticoli, M. ; Kaciulis, S. ; Mattogno, G. ; Pandolfi, L.

  • Author_Institution
    Dept. of Chem. Sci. & Technol., Tor Vergata Univ., Rome, Italy
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    379
  • Lastpage
    382
  • Abstract
    Thin films of Zr1-xSnxTiO4 (ZTS) were prepared by the polymeric precursor route. The influence of process parameters and dopants (Nb, Sb and Ta) on the chemical composition of the films was investigated by means of the XPS technique. Surface segregation of SnIV and the presence of Sn0, TiII, and TiIII species in the films were revealed from XPS depth profiles.
  • Keywords
    X-ray photoelectron spectra; antimony; ceramics; doping profiles; liquid phase deposited coatings; liquid phase deposition; microwave materials; niobium; surface composition; surface segregation; tantalum; tin compounds; zirconium compounds; XPS depth profiles; ZTS thin film; ZrSnTiO4:Nb; ZrSnTiO4:Sb; ZrSnTiO4:Ta; dopant effect; film chemical composition; microelectronics; polymeric precursor route synthesis; process parameters; surface segregation; Chemical elements; Electrostatics; Gold; Lenses; Microelectronics; Sputtering; Surface contamination; Tin; Transistors; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
  • Print_ISBN
    0-7803-6698-0
  • Type

    conf

  • DOI
    10.1109/COMMAD.2000.1022969
  • Filename
    1022969
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2042883