Title :
TEM characterization for magnetic nano structure processing
Author :
Rice, P.M. ; Fontana, R.E. ; Childress, J.R. ; Parkin, S.S.P. ; Marinero, E.E.
Author_Institution :
IBM Almaden Res. Center, San Jose, CA, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this article, we discuss practical factors in the application of TEM as part of development of processing of magnetic nanostructures.
Keywords :
magnetic thin film devices; nanoelectronics; transmission electron microscopy; TEM characterization; magnetic nanostructure processing; Diffraction; Electron beams; Large Hadron Collider; Lenses; Light scattering; Magnetic films; Magnetic materials; Magnetic sensors; Material storage; Thin film sensors;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230325
