Effect of thermal treatment on the structure and mechanical properties of coatings based on (Ti, Hf, Nb, Si)N

Author

Shypylenko, A.P. ; Kaverina, A.Sh. ; Komarov, F.F. ; Kupchishin, A.I.

Author_Institution

Sumy State Univ., Sumy, Ukraine

fYear

2013

fDate

8-14 Sept. 2013

Firstpage

853

Lastpage

854

Abstract

The paper presents the results of original research of nanostructured coatings based on (Ti, Hf, Nb, Si)N deposited by CAVD method. Coatings were investigated by several complementary methods of the structural element-analysis, such as: proton microbeam (μ-PIXE), micro- and nano-electron beam (EDX and SEM analysis), XRD. Elemental composition, microstructure, residual stresses in nanograins, profiles of atomic distribution on the surface of coatings in 3D view, phase composition, texture of surface were determined before and after annealing at temperatures 300, 500, 800, 1000°C (annealing time τ = 30 min).

Keywords

X-ray chemical analysis; X-ray diffraction; annealing; crystal microstructure; hafnium compounds; internal stresses; ion microprobe analysis; nanocomposites; nanofabrication; nanostructured materials; niobium compounds; scanning electron microscopy; silicon compounds; surface texture; titanium compounds; vapour deposited coatings; μ-PIXE; (TiHfNbSi)N; CAVD method; EDX; SEM; XRD; annealing time; atomic distribution profiles; elemental composition; mechanical properties; microelectron beam structural element-analysis; microstructure; nanoelectron beam structural element-analysis; nanograins; nanostructured coatings; phase composition; proton microbeam structural element-analysis; residual stresses; surface texture; temperature 1000 degC; temperature 300 degC; temperature 500 degC; temperature 800 degC; thermal treatment; Annealing; Coatings; Educational institutions; Hafnium; Niobium; Surface treatment; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Telecommunication Technology (CriMiCo), 2013 23rd International Crimean Conference

Conference_Location

Sevastopol

Print_ISBN

978-966-335-395-1

Type

conf

Filename

6653094