DocumentCode
2043400
Title
Investigation of multilayer nanostructured TiN/MoN coatings with different thicknesses of monolayers and their formation using C-PVD
Author
Bondar, O.V. ; Andreyev, A.A. ; Postolnyi, B.A. ; Abadias, G. ; Beresnev, V.M. ; Sobol, O.V.
Author_Institution
Sumy State Univ., Sumy, Ukraine
fYear
2013
fDate
8-14 Sept. 2013
Firstpage
865
Lastpage
866
Abstract
Multilayer coatings based on TiN/MoN with different monolayers thickness have been obtained by using C-PVD method. XRD, SEM, EDX, HRTEM and AFM analyzes of coatings have been carried out. Specific relationship between the layers thicknesses, substrate potential, the annealing process, physical and mechanical properties of samples have been revealed.
Keywords
X-ray chemical analysis; annealing; atomic force microscopy; coatings; molybdenum compounds; multilayers; nanofabrication; nanostructured materials; scanning electron microscopy; titanium compounds; transmission electron microscopy; vapour deposition; AFM; C-PVD; EDX; HRTEM; SEM; TiN-MoN; XRD; annealing; mechanical properties; monolayers; multilayer nanostructured coatings; physical properties; Coatings; Educational institutions; Electronic mail; Nonhomogeneous media; Substrates; Tin; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2013 23rd International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-966-335-395-1
Type
conf
Filename
6653100
Link To Document