Title :
Plasmachemical Processing of Field Emission Cathodes Made of Carbon Fibers Bundles
Author :
Leshukov, M.Yu. ; Sheshin, E.P.
Author_Institution :
Moscow Inst. of Phys. & Technol.
Abstract :
A new method of processing field emission cathodes made of carbon fiber bundle is presented. It is the etching of carbon fibers bundle cathode by corona discharge on air. The influence of the plasmachemical processing on the emission characteristics of the field emission cathodes, was examined. Results show that for cathodes processed by corona discharge, carbon fiber bundle is subject less to the abrupt reorganization of its structure (redistribution of fibers in a bundle). Also, the value of local fluctuation of anode voltage had been significantly decreased. The field emission parameters of cathodes, namely: the emitting surface area and the form-factor of the cathode, have been obtained from analysis of the current-voltage characteristics. The form-factor of the cathode after the processing by corona discharge has been decreased while the emitting surface area of the cathode after the etching process has been increased. The plasmachemical processing by corona discharge promoted for more uniform distribution of field emission electrons on the surface of the cathode
Keywords :
carbon fibres; cathodes; corona; field emission; sputter etching; C; anode voltage; carbon fiber bundles; cathode form-factor; corona discharge; current-voltage characteristics; emitting surface area; etching; field emission cathodes; field emission electron distribution; plasmachemical processing; polyacrylonitrile carbon fibers; Anodes; Carbon dioxide; Cathodes; Corona; Etching; Fluctuations; Plasma applications; Plasma materials processing; Plasma properties; Surface discharges;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335494