• DocumentCode
    2044115
  • Title

    Fabrication of micropump with spiral-type magnetic micro-machine

  • Author

    Yamazaki, Akiko ; Sendoh, M. ; Ishiyama, Kazushi ; Arai, K.I.

  • Author_Institution
    Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
  • fYear
    2003
  • fDate
    March 30 2003-April 3 2003
  • Abstract
    In this paper, we propose a micropump using a magnetic micro-machine. Magnetic micro-machines require no power supply cables, no controlling systems on the machine body. So this micropump works without wire and is suitable for the miniaturization. We fabricated the micropump and examined its properties.
  • Keywords
    magnetic devices; micropumps; small electric machines; micropump; spiral-type magnetic micro-machine; Fabrication; Frequency; Magnetic fields; Micromagnetics; Micropumps; Petroleum; Silicon; Spirals; Viscosity; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2003. INTERMAG 2003. IEEE International
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7647-1
  • Type

    conf

  • DOI
    10.1109/INTMAG.2003.1230363
  • Filename
    1230363
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2044115