Title :
Fabrication of micropump with spiral-type magnetic micro-machine
Author :
Yamazaki, Akiko ; Sendoh, M. ; Ishiyama, Kazushi ; Arai, K.I.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we propose a micropump using a magnetic micro-machine. Magnetic micro-machines require no power supply cables, no controlling systems on the machine body. So this micropump works without wire and is suitable for the miniaturization. We fabricated the micropump and examined its properties.
Keywords :
magnetic devices; micropumps; small electric machines; micropump; spiral-type magnetic micro-machine; Fabrication; Frequency; Magnetic fields; Micromagnetics; Micropumps; Petroleum; Silicon; Spirals; Viscosity; Wire;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230363
