Title :
Field Emission from Nanodiamonds Embedded Diamond-Like Carbon Films
Author :
Xie, W.G. ; Chen, Jian ; Deng, S.Z. ; Xu, N.S.
Author_Institution :
State Key Lab. of Optoelectron. Mater. & Technol., Zhongshan Univ., Guangzhou
Abstract :
In this paper, nanodiamonds embedded diamond-like carbon films were fabricated. Nanodiamonds were dispersed onto silicon wafer by dielectrophoresis technique while the DLC films were deposited using magnetic filtered cathodic vacuum arc (MFCVA) technique. Surface inhomogeneity of morphology, contact potential and resistance of the films were studied by using scanning electron microscopy, Raman spectroscopy, and Omicron AFM/STM system under ultra-high vacuum technique
Keywords :
Raman spectra; atomic force microscopy; contact potential; diamond; diamond-like carbon; electrical resistivity; electron field emission; electrophoresis; nanostructured materials; scanning electron microscopy; scanning tunnelling microscopy; surface morphology; vacuum deposited coatings; C-C; DLC films; Omicron AFM/STM system; Raman spectroscopy; contact potential; dielectrophoresis technique; field emission; film resistance; magnetic filtered cathodic vacuum arc technique; nanodiamonds embedded diamond-like carbon films; scanning electron microscopy; silicon wafer; surface inhomogeneity; surface morphology; Diamond-like carbon; Dielectrophoresis; Magnetic films; Magnetic separation; Semiconductor films; Silicon; Surface morphology; Surface resistance; Vacuum arcs; Vacuum technology;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335218
