Title :
Measuring high magnetic fields with a U-shaped micro machined cantilever using an optical readout
Author :
Keplinger, F. ; Kvasnica, S. ; Hauser, H.
Author_Institution :
Vienna Univ. of Technol, Austria
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we describe cantilever sensor which should be used to improve the control of the thyristor rectifier of the power source to get constant magnetic fields during the pulse. Due to quasi-static conditions induction coils are not applicable because they mainly detect the higher harmonics and have zero sensitivity at DC-fields. For measuring the magnetic fields the bending of a U-shaped Si-cantilever is used.
Keywords :
elemental semiconductors; magnetic field measurement; magnetic sensors; microsensors; optical fibre couplers; silicon; DC field; Si; Si cantilever sensor; U-shaped micromachined cantilever; bending; magnetic field measurement; magnetic pulse; optical coupler; optical readout; thyristor rectifier; Coils; Light emitting diodes; Magnetic field measurement; Magnetic flux; Magnetic sensors; Optical fiber devices; Optical fiber sensors; Optical pulses; Optical sensors; Temperature sensors;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230369
