Title :
Pulsed Laser Deposited Ag-Sio2 Nanocomposite Thin Films For Vacuum Microelectronic Applications
Author :
Tsang, W.M. ; Henley, S.J. ; Blanchard, N. ; Silva, S.R.P.
Author_Institution :
Nano-Electron. Centre, Surrey Univ., Guildford
Abstract :
Ag-SiO2 nanocomposite layers are synthesized by pulsed laser ablation at room temperature. The synthesized materials are characterized using XPS, RBS, SEM and TEM and the field emission properties are investigated
Keywords :
Rutherford backscattering; X-ray photoelectron spectra; field emission; nanocomposites; pulsed laser deposition; scanning electron microscopy; silicon compounds; silver; transmission electron microscopy; vacuum deposited coatings; vacuum microelectronics; 20 to 120 nm; 293 to 298 K; Ag-SiO2; RBS; SEM; TEM; XPS; field emission; nanocomposite thin films; room temperature pulsed laser ablation; vacuum microelectronics; Atomic beams; Atomic layer deposition; Atomic measurements; Iron; Laser ablation; Microelectronics; Optical pulses; Pulse measurements; Pulsed laser deposition; Sputtering;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335226
