Title :
Fabrication of NdFeB thick film magnets by high speed PLD method
Author :
Nakano, M. ; Katoh, R. ; Fukunaga, H. ; Tsutsumi, S. ; Yamashita, F.
Author_Institution :
Fac. of Eng., Nagasaki Univ., Japan
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, the targets with the compositions of Nd/sub x/Fe/sub 14/B (X=2.0-4.0) were prepared. Then, they were ablated with a pulse laser at the repetition rate of 30 Hz, and films were deposited on Ta substrates. The coercivity and remanence of the films were almost independent of the film thickness at approximately 1000 kA/m and 0.55 T within the thickness range of 10-80 /spl mu/m. Also the maximum energy product value of 77 kJ/m/sup 3/ as the best magnetic property was obtained by using the high speed PLD method.
Keywords :
boron alloys; coercive force; ferromagnetic materials; iron alloys; magnetic thin films; neodymium alloys; pulsed laser deposition; remanence; 0.55 T; 10 to 80 micron; 30 Hz; NdFeB; NdFeB thick film magnets; Ta; Ta substrates; coercivity; high speed PLD; pulsed laser ablation; remanence; Coercive force; Iron; Magnetic films; Magnets; Neodymium; Optical device fabrication; Optical pulses; Pulsed laser deposition; Substrates; Thick films;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230386
