• DocumentCode
    20448
  • Title

    Thermocapillary Actuation of Millimeter-Scale Rotary Structures

  • Author

    Hendarto, Erwin ; Gianchandani, Yogesh B.

  • Author_Institution
    Univ. of Michigan, Ann Arbor, MI, USA
  • Volume
    23
  • Issue
    2
  • fYear
    2014
  • fDate
    Apr-14
  • Firstpage
    494
  • Lastpage
    499
  • Abstract
    In this paper, we describe the rotary motion, by Marangoni flow, of a millimeter-scale rotary structure immersed in a thin layer of liquid. A 16 × 8 array of 1 × 0.8 × 0.3 mm3 surface-mount resistors is suspended ≈ 500 μm above the liquid to serve as a programmable heat source. The continuous operation of resistor elements is used to impose a spatially-defined temperature gradient on the surface of the liquid. With a maximum temperature gradient of 36.6 K/mm at the surface of a 2 mm-thick film of liquid with viscosity 5 cSt, a stainless steel rotary structure with a weight of ≈ 10 mg, a diameter of 4.1 mm, and blade angle of 34° takes 28 s to make a 360° rotation. In general, the angular velocity of the rotary structure is affected by the temperature gradient of the liquid surface and liquid viscosity among several factors.
  • Keywords
    convection; microactuators; microfluidics; resistors; stainless steel; surface tension; viscosity; Marangoni flow; angular velocity; liquid surface; liquid viscosity; millimeter-scale rotary structures; programmable heat source; resistor elements; rotary motion; size 2 mm; size 4.1 mm; spatially-defined temperature gradient; stainless steel rotary structure; surface-mount resistors; thermocapillary actuation; Acceleration; Blades; Heating; Liquids; Surface tension; Torque; Viscosity; Marangoni effect; microfluidics; rotary structure; thermal actuation; thermocapillary;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2013.2281328
  • Filename
    6606811