Title :
Experimental Investigation of Micro-fabricated Folded Waveguide Backward Wave Oscillator for Submillimeter Application
Author :
So, J.K. ; Shin, Y.M. ; Jang, K.H. ; Won, J.H. ; Srivastava, A. ; Kim, J.H. ; Chang, S.S. ; Park, G.S.
Author_Institution :
Sch. of Phys., Seoul Nat. Univ.
Abstract :
Successful two-step X-ray lithography (LIGA) process is demonstrated for the first time and integration with the cold cathodes using Spindt-type Moly tip or carbon nanotube are being investigated
Keywords :
LIGA; backward wave oscillators; carbon nanotubes; micromechanical devices; nanotube devices; submillimetre wave oscillators; vacuum microelectronics; waveguide components; C; LIGA; Spindt-type Moly tip cold cathode; carbon nanotube cold cathode; microfabricated folded waveguide backward wave oscillator; submillimeter application; two-step X-ray lithography process; vacuum electronics; Frequency; Geometry; Microwave devices; Millimeter wave technology; Oscillators; Submillimeter wave circuits; Submillimeter wave technology; Vacuum technology; X-ray lithography; X-ray scattering;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335243
