Title :
Carbon Nanotube Lateral Field Emitters with Metallic Anode
Author :
Wong, Y.M. ; Kang, W.P. ; Davidson, J.L. ; Choi, B.K. ; Huang, J.H.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Vanderbilt Univ., Nashville, TN
Abstract :
A lateral carbon nanotube (CNT) field emission device with a metallic anode is fabricated through a dual-mask microfabrication process complemented with a two-step microwave plasma-enhanced chemical vapor deposition. SEM was employed to characterize the structure of the fabricated device
Keywords :
anodes; carbon nanotubes; electron field emission; masks; nanotechnology; plasma CVD; scanning electron microscopy; C; SEM; dual-mask microfabrication process; lateral carbon nanotube field emission device; metallic anode; two-step microwave plasma-enhanced chemical vapor deposition; Anodes; Carbon nanotubes; Electron devices; Fabrication; Inorganic materials; Organic materials; Plasma chemistry; Plasma devices; Plasma properties; Semiconductor materials; MPCVD; carbon nanotubes; field emission; lateral device;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335248
