Title :
Development of Compact SEM Equipped with Carbon Nanotube Field Emission Cathode
Author :
Yabushita, Ryosuke ; Hata, Koichi ; Sato, Hideki ; Saito, Yahachi
Author_Institution :
Graduate Sch. of Eng., Mie Univ., Tsu
Abstract :
This article presents a preliminary results on the development of a compact FE-SEM equipped with a multiwall carbon nanotube field emission cathode, a Butler electrostatic lens as a condenser lens and an objective lens made of a permanent magnet. The instrument was tested on a Cu 200 mesh with 25 mum line width
Keywords :
carbon nanotubes; cathodes; copper; electrostatic lenses; field emission electron microscopy; scanning electron microscopy; Butler electrostatic lens; C; Cu; compact SEM; condenser lens; field emission SEM; multiwall carbon nanotube field emission cathode; objective lens; permanent magnet; Carbon dioxide; Carbon nanotubes; Cathodes; Electrodes; Electron beams; Focusing; Iron; Lenses; Organic materials; Permanent magnets;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335250
