An optical wireless bistable micro-actuator

Author

Xingxing Liu ; Al Hajjar, Hani ; Lamarque, Frederic ; Dore, Emmanuel ; Carton, Olivier ; Zeinert, Andreas ; Charvet, Stephane

Author_Institution

Univ. de Technol. de Compiegne, Compiegne, France

fYear

2015

fDate

2-5 Aug. 2015

Firstpage

1624

Lastpage

1629

Abstract

An optical wireless bistable micro-actuator is presented in this paper. The bistable mechanism is based on antagonistic pre-shaped double beams, which have the merits of simple pre-load operation and symmetrical output force. The bistable micro-actuator was fabricated with deep reactive ion etching (DRIE) technique using silicon on insulator (SOI) wafer. The bistable beam has a thickness of 25 μm and a depth of 400 μm. The stroke of the bistable micro-actuator is 300 μm. An 8 μm thick compressive SiO₂ layer is deposited on one side of the strip shaped (0.1×1×3 mm) shape memory alloy (SMA) active element, acting as the biasing spring. The SiO₂ layer created a two way memory effect and eliminated the load effect of SMA element. Stroke of SMA element is tested. The wireless actuation was realized by laser heated SMA active element.

Keywords

microactuators; shape memory effects; sputter etching; DRIE; SMA; SOI; antagonistic preshaped double beams; biasing spring; bistable mechanism; deep reactive ion etching technique; laser heated SMA active element; optical wireless bistable microactuator; preload operation; silicon on insulator wafer; strip shaped shape memory alloy active element; symmetrical output force; thick compressive SiO₂ layer; two way memory effect; Force; Heating; Laser beams; Optical beams; Shape; Switches; Wireless communication; Bistable micro-actuator; Micro-fabrication; Wireless actuation; shape memory alloy;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2015 IEEE International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4799-7097-1

Type

conf

DOI

10.1109/ICMA.2015.7237728

Filename

7237728