Title :
Failure Analysis of Local Electrodes
Author :
Russell, K.F. ; Miller, M.K.
Author_Institution :
Div. of Mater. Sci. & Technol., Oak Ridge Nat. Lab., TN
Abstract :
A failure analysis of local electrodes has been performed with the use of a dual beam ion miller/scanning electron microscope. Each aperture was examined before and after use in the local electrode atom probe. In addition, many atom probe specimens were characterized after the experiment to correlate the condition of the specimen with that of the aperture. The predominant failure mode of specimens was found to be melting even for high melting point materials such as tungsten and superalloys. A much less frequent mode of failure was specimen rupture which generally occurred with very brittle materials. The lifetime of the aperture in the local electrode atom probe was found to be dependent on the shape and position of the debris from the failure rather than the number of ions collected or the number of specimens characterized
Keywords :
aluminium; atom probe field ion microscopy; boron alloys; electrodes; fracture; iron alloys; neodymium alloys; nickel alloys; scanning electron microscopy; superalloys; tungsten; Al; FeNdB; W; aperture lifetime; brittle materials; dual beam ion miller-scanning electron microscope; failure analysis; local electrode atom probe; local electrodes; melting; specimen rupture; superalloys; Apertures; Electrodes; Electron beams; Failure analysis; Ion beams; Laboratories; Materials science and technology; Probes; Pulse generation; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335297