Title :
New Tomographic Atom Probe at University of Muenster, Germany
Author :
Stender, Patrick ; Schmitz, Guido
Author_Institution :
Inst. of Mater. Phys., Westfalischen Wilhelms-Univ., Munster
Abstract :
Atom probe tomography provides the highest spatial resolution compared to all other volume analysis techniques. Owing to its single atom sensitivity, it is particularly suited to study nanostructured materials. Therefore, a cost-effective non-commercial atom probe was installed at the Institute for Material Physics in Muenster, Germany to study thin film reactions. This paper reports on the design and measurement characterizations of the instrument
Keywords :
atom probe field ion microscopy; nanostructured materials; thin films; Germany; Institute for Material Physics; University of Muenster; atom probe tomography; instrument design; nanostructured materials; thin film reactions; Apertures; Detectors; Instruments; Nanostructured materials; Physics; Position measurement; Probes; Time measurement; Tomography; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335334
