Title :
A Green function-based parasitic extraction method for inhomogeneous substrate layers
Author :
Xu, Chenggang ; Gharpurey, Ranjit ; Fiez, Terri S. ; Mayaram, Kartikeya
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA
Abstract :
This paper presents a new Green function-based approach for substrate parasitic extraction in substrates with inhomogeneous layers. This new formulation allows analysis of noise coupling with sinkers, trenches and wells, - a limitation in prior Green function-based extractors. Numerical examples for sinkers and trenches are provided and compared with the results from 3D semiconductor device simulations. It is shown that the proposed method is accurate and computationally efficient.
Keywords :
BiCMOS integrated circuits; Green´s function methods; circuit analysis computing; integrated circuit modelling; integrated circuit noise; semiconductor device models; BiCMOS integrated circuits; Green function methods; Green function-based extractors; inhomogeneous substrate layers; integrated circuit modelling; integrated circuit noise; noise coupling; substrate parasitic extraction method; Boundary element methods; Circuit noise; Circuit simulation; Computational efficiency; Conductivity; Finite difference methods; Finite element methods; Green function; Semiconductor device noise; Substrates;
Conference_Titel :
Design Automation Conference, 2005. Proceedings. 42nd
Print_ISBN :
1-59593-058-2
DOI :
10.1109/DAC.2005.193788
