Title :
Creation of design algorithm of working elements of micromechanical gyroscopes
Author :
Lobur, Mykhaylo ; Holovatyy, Andriy
Author_Institution :
Dept. of CAD Syst., Lviv Polytech. Nat. Univ., Lviv
Abstract :
In this paper, the mathematical model of vibrations of the micromechanical gyroscope and the design algorithm of the constructive parameters of its working elements are proposed.
Keywords :
gyroscopes; micromechanical devices; vibrations; MEMS design; constructive parameters; micromechanical gyroscopes; tuning fork gyroscope; vibrations; Algorithm design and analysis; Angular velocity; Capacitance; Capacitors; Electrostatics; Equations; Gyroscopes; Mathematical model; Micromechanical devices; Vibrations; MEMS (MicroElectroMechanical Systems); MEMS two-mass tuning fork gyroscope; angular velocity; constructive parameters; design algorithm; inertial sensors; working element;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558734
