Title :
Reliability in MEMS and mechanical fatigue tests on gold micro-structures
Author :
Pasquale, G. De ; Soma, A.
Author_Institution :
Dept. of Mech., Polytech. of Torino, Torino
Abstract :
The mechanical fatigue behavior of MEMS gold structures is analyzed. Preliminary numerical FEM simulations are performed to determine the tension level in the material for a certain actuation voltage. Experimental tests are performed in order to monitor the damage accumulation during loading cycles; fatigue effect on material is evaluated through the monitoring of the pull-in voltage of the device.
Keywords :
fatigue testing; finite element analysis; gold; micromechanical devices; reliability; Au; FEM simulations; MEMS gold structures; MEMS reliability; actuation voltage; damage accumulation; gold micro-structures; loading cycles; mechanical fatigue tests; pull-in voltage; Fatigue; Gold; Materials reliability; Materials testing; Micromechanical devices; Monitoring; Optical interferometry; Optical microscopy; Performance evaluation; Voltage;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558749
