Title :
The main points of the microelectromechanical systems development
Author_Institution :
Precision Mech. Dept., Lviv Polytech. Nat. Univ., Lviv
Abstract :
In this paper the basic MEMS structure and main development problems are considered. It´s also accented on the design of the most used types of MEMS parts and the most popular MEMS applications are mentioned. In this paper the main points and tasks of the microelectromechanical systems development are described.
Keywords :
micromechanical devices; MEMS structure; microelectromechanical systems development; Actuators; Arm; Costs; Current; Electrodes; Electromagnetic forces; Microelectromechanical systems; Micromechanical devices; Organic materials; Production; MEMS development; main tasks; structure;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558754
