DocumentCode
2047893
Title
VHDL-AMS — model for capacitive interdigital accelerometer
Author
Zaharyuk, Roman ; Teslyuk, Vasyl ; Farmaga, Ihor ; Alshawabkeh, Hamza Ali Yousef
fYear
2008
fDate
21-24 May 2008
Firstpage
134
Lastpage
137
Abstract
In this paper, is developed VHDL-AMS model for capacitive microaccelerometer of IDT construction for design on the schematic design level. Presented analysis results of the developed model.
Keywords
accelerometers; capacitive sensors; hardware description languages; microsensors; IDT construction; VHDL-AMS; capacitive interdigital accelerometer; hardware description languages; microsensors; Acceleration; Accelerometers; Capacitance; Capacitors; Electrical equipment industry; Electrostatics; Mathematical model; Seismic measurements; Vibration measurement; Voltage; VHDL-AMS; capacitive accelerometer;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location
Polyana
Print_ISBN
978-966-2191-00-4
Type
conf
DOI
10.1109/MEMSTECH.2008.4558761
Filename
4558761
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