• DocumentCode
    2047893
  • Title

    VHDL-AMS — model for capacitive interdigital accelerometer

  • Author

    Zaharyuk, Roman ; Teslyuk, Vasyl ; Farmaga, Ihor ; Alshawabkeh, Hamza Ali Yousef

  • fYear
    2008
  • fDate
    21-24 May 2008
  • Firstpage
    134
  • Lastpage
    137
  • Abstract
    In this paper, is developed VHDL-AMS model for capacitive microaccelerometer of IDT construction for design on the schematic design level. Presented analysis results of the developed model.
  • Keywords
    accelerometers; capacitive sensors; hardware description languages; microsensors; IDT construction; VHDL-AMS; capacitive interdigital accelerometer; hardware description languages; microsensors; Acceleration; Accelerometers; Capacitance; Capacitors; Electrical equipment industry; Electrostatics; Mathematical model; Seismic measurements; Vibration measurement; Voltage; VHDL-AMS; capacitive accelerometer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
  • Conference_Location
    Polyana
  • Print_ISBN
    978-966-2191-00-4
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2008.4558761
  • Filename
    4558761