Title :
Tb doped CoTaZr soft magnetic films for integrated inductors
Author :
Crawford, A.M. ; Babu, A. ; Sun, N.X. ; Wang, S.X.
Author_Institution :
Dept. of Mater. Sci. & Eng., Stanford Univ., CA, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we developed a CoZrTa material with a ferromagnetic resonance frequency of 2 GHz. This was achieved by doping the films with 2 at % of Tb. Furthermore, the effect of patterning on the magnetic properties of the films was studied.
Keywords :
amorphous magnetic materials; cobalt alloys; ferromagnetic materials; ferromagnetic resonance; magnetic anisotropy; magnetic domains; magnetic thin films; soft magnetic materials; tantalum alloys; terbium; zirconium alloys; 2 GHz; CoZrTa; Tb doped CoTaZr soft magnetic films; ferromagnetic resonance; integrated inductors; magnetic properties; Amorphous magnetic materials; Anisotropic magnetoresistance; Inductors; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic resonance; Magnetostriction; Perpendicular magnetic anisotropy; Soft magnetic materials;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230534
