DocumentCode
2048412
Title
Tb doped CoTaZr soft magnetic films for integrated inductors
Author
Crawford, A.M. ; Babu, A. ; Sun, N.X. ; Wang, S.X.
Author_Institution
Dept. of Mater. Sci. & Eng., Stanford Univ., CA, USA
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, we developed a CoZrTa material with a ferromagnetic resonance frequency of 2 GHz. This was achieved by doping the films with 2 at % of Tb. Furthermore, the effect of patterning on the magnetic properties of the films was studied.
Keywords
amorphous magnetic materials; cobalt alloys; ferromagnetic materials; ferromagnetic resonance; magnetic anisotropy; magnetic domains; magnetic thin films; soft magnetic materials; tantalum alloys; terbium; zirconium alloys; 2 GHz; CoZrTa; Tb doped CoTaZr soft magnetic films; ferromagnetic resonance; integrated inductors; magnetic properties; Amorphous magnetic materials; Anisotropic magnetoresistance; Inductors; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic resonance; Magnetostriction; Perpendicular magnetic anisotropy; Soft magnetic materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230534
Filename
1230534
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