DocumentCode
2048486
Title
High pressure hollow electrode discharges
Author
Schoenbach, Karl H. ; El-Habachi, A. ; Shi, W. ; Ciocca, M.
Author_Institution
Phys. Electron. Res. Inst., Old Dominion Univ., Norfolk, VA, USA
fYear
1997
fDate
19-22 May 1997
Firstpage
239
Abstract
Summary form only given. Reduction of the cathode hole diameter into the submillimeter range has allowed us to extend the pressure range for hollow electrode discharge operation to values on the order of 50 Torr. In recent experiments with cathode holes of 0.2 mm diameter we obtained stable glow discharge operation up to approximately 900 Torr in argon. The current-voltage (I-V) characteristics of these discharges (with currents ranging from the ten´s of /spl mu/A to ten mA) show three distinct discharge modes: at low current, a discharge with positive differential resistivity, followed by a range with strong increase in current and reduction in voltage, and, at high current, again a resistive discharge mode. The resistive characteristic of high pressure hollow electrode discharges over a large range of current allows us to generate arrays of these discharges for use as flat panel, direct current, excimer lamps.
Keywords
argon; discharge lamps; electrical conductivity; excimers; glow discharges; xenon; 0.2 mm; 128 nm; 172 nm; 50 to 900 torr; Ar; Xe; argon; cathode hole diameter; flat panel DC excimer lamps; high pressure hollow electrode discharges; positive differential resistivity; resistive characteristic; resistive discharge mode; stable glow discharge operation; Argon; Cathodes; Character generation; Conductivity; DC generators; Electrodes; Electrons; Glow discharges; Partial discharges; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.606099
Filename
606099
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