Title :
High pressure hollow electrode discharges
Author :
Schoenbach, Karl H. ; El-Habachi, A. ; Shi, W. ; Ciocca, M.
Author_Institution :
Phys. Electron. Res. Inst., Old Dominion Univ., Norfolk, VA, USA
Abstract :
Summary form only given. Reduction of the cathode hole diameter into the submillimeter range has allowed us to extend the pressure range for hollow electrode discharge operation to values on the order of 50 Torr. In recent experiments with cathode holes of 0.2 mm diameter we obtained stable glow discharge operation up to approximately 900 Torr in argon. The current-voltage (I-V) characteristics of these discharges (with currents ranging from the ten´s of /spl mu/A to ten mA) show three distinct discharge modes: at low current, a discharge with positive differential resistivity, followed by a range with strong increase in current and reduction in voltage, and, at high current, again a resistive discharge mode. The resistive characteristic of high pressure hollow electrode discharges over a large range of current allows us to generate arrays of these discharges for use as flat panel, direct current, excimer lamps.
Keywords :
argon; discharge lamps; electrical conductivity; excimers; glow discharges; xenon; 0.2 mm; 128 nm; 172 nm; 50 to 900 torr; Ar; Xe; argon; cathode hole diameter; flat panel DC excimer lamps; high pressure hollow electrode discharges; positive differential resistivity; resistive characteristic; resistive discharge mode; stable glow discharge operation; Argon; Cathodes; Character generation; Conductivity; DC generators; Electrodes; Electrons; Glow discharges; Partial discharges; Voltage;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.606099