Title :
Micro inductor for flip chip micro power source
Author :
Sugawara, E. ; Wakou, N. ; Sato, F. ; Matsuki, H. ; Yamaguchi, M. ; Shirakawa, K. ; Masumoto, T.
Author_Institution :
Res. & Dev. Unit, NEC TOKIN Corp., Sendai, Japan
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we describe the high quality, superior dc-biased properties of the proposed low height micro inductors for flip chip size micro power sources.
Keywords :
flip-chip devices; inductance; power inductors; dc-biased properties; flip chip micro power source; micro inductor; Amorphous magnetic materials; Flip chip; Inductors; Magnetic cores; Magnetic films; Magnetic flux; Micromechanical devices; Polyimides; Saturation magnetization; Sputtering;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230538