Title :
The phase angle modulation by capacitive sensors in integrated microstructures
Author :
Sroka, Ryszard ; Szyper, Michaj
Author_Institution :
Dept. of Instrum. & Measure., Univ. of Min. & Metall., Cracow, Poland
Abstract :
A model of a capacitive differential microsensor cooperating with a phase angle modulation system with a large deviation (±1.5 rad) is presented. The modulator system is simple and cheap suggesting the possibility of integrating the sensor with the modulator and maybe with an angle demodulator. All the tests were realized on models using the PSPICE program. The influence of the sensor and modulator parameters on the signal processing accuracy in the system was tested. Parameters such as condenser leakance, frequency variation of the carrier signal, variation of the reference voltage angle, asymmetry of the sensor and the harmonic disturbances were taken into consideration. An estimation of the system dynamics was undertaken
Keywords :
Hamming codes; Hilbert transforms; angle modulation; capacitance measurement; demodulation; electric sensing devices; microsensors; phase modulation; Hamming window; Hilbert transform; PSPICE; capacitive differential microsensor; carrier signal; condenser leakance; demodulation methods; frequency variation; harmonic disturbances; integrated microstructures; inverse FT; nonlinearity error; phase angle modulation; reference voltage angle variation; sensor asymmetry; signal processing accuracy; system dynamics; Capacitive sensors; Demodulation; Frequency; Microsensors; Phase modulation; SPICE; Sensor systems; Signal processing; System testing; Voltage;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1996. IMTC-96. Conference Proceedings. Quality Measurements: The Indispensable Bridge between Theory and Reality., IEEE
Conference_Location :
Brussels
Print_ISBN :
0-7803-3312-8
DOI :
10.1109/IMTC.1996.507332
