Title :
Design and analysis of a spatial 3-DOF micromanipulator for tele-operation
Author :
Chung, Goo Bong ; Yi, Byung-Ju ; Suh, Il Hong ; Kim, Whee Kuk ; Chung, Wan Kyun
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Hanyang Univ., Ansan, South Korea
Abstract :
In this paper, we propose and develop a spatial 3-DOF tele-micromanipulator for precise position control of micro-objects. Typical feature of this device is a one-module flexure hinge that consists of a revolute joint and a spherical joint. Based on preliminary kinematic analysis and stiffness modeling of the system, optimal design and actuator sizing for the device are performed. Furthermore, FEM analysis and resonant frequency analysis are executed to validate the results of analytic design process. The designed device was successfully implemented to tele-micromanipulation system
Keywords :
finite element analysis; manipulator kinematics; micromanipulators; optimal control; telerobotics; FEM analysis; actuator sizing; kinematic analysis; micro-objects; one-module flexure hinge; optimal design; position control; resonant frequency analysis; revolute joint; spatial 3-DOF micromanipulator analysis; spatial 3-DOF micromanipulator design; spherical joint; stiffness modeling; telemanipulator; Actuators; Computer science; Electron microscopy; Fasteners; Instruments; Kinematics; Micromanipulators; Performance analysis; Process design; Resonance;
Conference_Titel :
Intelligent Robots and Systems, 2001. Proceedings. 2001 IEEE/RSJ International Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-6612-3
DOI :
10.1109/IROS.2001.973380
