Multiobject optimal scheduling for semiconductor manufacturing line based on satisfactory control

Due to more and more furious competition of microelectronic industry, the scheduling policies based on single-object can no longer meet the demand for the quality of semiconductor manufacturing line. This paper analyzes the performance targets of semiconductor manufacturing line, then extends the concept of satisfactory control to scheduling. Finally, the multiobject optimal scheduling based on satisfactory control is proposed. This method provides a way of performing an overall optimization of the manufacturing line.